Abstract
Submillimeter or micrometer scale electrically controlled soft actuators have immense potential in microrobotics, haptics, and biomedical applications. However, the fabrication of miniaturized and micropatterned open-air soft actuators has remained challenging. In this study, we demonstrate the microfabrication of trilayer electrochemical actuators (ECAs) through aerosol jet printing (AJP), a rapid prototyping method with a 10 μm lateral resolution. We make fully printed 1000 × 5000 × 12 μm3 ultrathin ECAs, each of which comprises a Nafion electrolyte layer sandwiched between two poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) electrode layers. The ECAs actuate due to the electric-field-driven migration of hydrated protons. Due to the thinness that gives rise to a low proton transport length and a low flexural rigidity, the printed ECAs can operate under low voltages (∼0.5 V) and have a relatively fast response (∼seconds). We print all the components of an actuator that consists of two individually controlled submillimeter segments and demonstrate its multimodal actuation. The convenience, versatility, rapidity, and low cost of our microfabrication strategy promise future developments in integrating arrays of intricately patterned individually controlled soft microactuators on compact stretchable electronic circuits.